Klemberg-Sapieha, J. (1996):
Plasma deposition of low-stress electret films on electroacoustic and solar cell application.
In: Journal of Vacuum Science and Technology A, 14 (5), pp. 2775-2780. American Vacuum Society (AVS), ISSN 0734-2101,
DOI: 10.1116/1.580199,
[Article]
| Item Type: | Article |
|---|---|
| Erschienen: | 1996 |
| Creators: | Klemberg-Sapieha, J. |
| Title: | Plasma deposition of low-stress electret films on electroacoustic and solar cell application |
| Language: | English |
| Journal or Publication Title: | Journal of Vacuum Science and Technology A |
| Volume of the journal: | 14 |
| Issue Number: | 5 |
| Publisher: | American Vacuum Society (AVS) |
| Divisions: | 18 Department of Electrical Engineering and Information Technology |
| Date Deposited: | 19 Nov 2008 16:02 |
| DOI: | 10.1116/1.580199 |
| License: | [undefiniert] |
| PPN: | |
| Export: | |
| Suche nach Titel in: | TUfind oder in Google |
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