Klemberg-Sapieha, J. (1996):
Plasma deposition of low-stress electret films on electroacoustic and solar cell application.
In: Journal of Vacuum Science and Technology A, 14 (5), pp. 2775-2780. American Vacuum Society (AVS), ISSN 0734-2101,
DOI: 10.1116/1.580199,
[Article]
Item Type: | Article |
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Erschienen: | 1996 |
Creators: | Klemberg-Sapieha, J. |
Title: | Plasma deposition of low-stress electret films on electroacoustic and solar cell application |
Language: | English |
Journal or Publication Title: | Journal of Vacuum Science and Technology A |
Volume of the journal: | 14 |
Issue Number: | 5 |
Publisher: | American Vacuum Society (AVS) |
Divisions: | 18 Department of Electrical Engineering and Information Technology |
Date Deposited: | 19 Nov 2008 16:02 |
DOI: | 10.1116/1.580199 |
License: | [undefiniert] |
PPN: | |
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