Durst, F. ; Galjukov, A. ; Makarov, Y. ; Schäfer, Michael ; Voinovich, P. ; Zhmakin, A.
Efficient 3D Unstructured Grid Algorithms for Modelling of Chemical Vapour Deposition in Horizontal Reactors.
In: Simulation of Semiconductor Devices and Processes, 6
Article, Bibliographie
| Item Type: | Article |
|---|---|
| Erschienen: | 1996 |
| Editors: | Ryssel, H. ; Pichler, P. |
| Creators: | Durst, F. ; Galjukov, A. ; Makarov, Y. ; Schäfer, Michael ; Voinovich, P. ; Zhmakin, A. |
| Type of entry: | Bibliographie |
| Title: | Efficient 3D Unstructured Grid Algorithms for Modelling of Chemical Vapour Deposition in Horizontal Reactors |
| Language: | English |
| Date: | September 1996 |
| Publisher: | Springer |
| Journal or Publication Title: | Simulation of Semiconductor Devices and Processes |
| Volume of the journal: | 6 |
| Divisions: | 16 Department of Mechanical Engineering > Institute of Numerical Methods in Mechanical Engineering (FNB) 16 Department of Mechanical Engineering |
| Date Deposited: | 24 Mar 2014 14:18 |
| Last Modified: | 07 Apr 2014 07:08 |
| PPN: | |
| Export: | |
| Suche nach Titel in: | TUfind oder in Google |
 |
Send an inquiry |
Options (only for editors)
 |
Show editorial Details |
Drucken
Impressum