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Structure and mechanical properties of silica doped zirconia thin films

Uhlmann, Ina ; Hawelka, Dominik ; Hildebrandt, Erwin ; Pradella, Jens ; Rödel, Jürgen (2013)
Structure and mechanical properties of silica doped zirconia thin films.
In: Thin Solid Films, 527
doi: 10.1016/j.tsf.2012.08.007
Article, Bibliographie

Abstract

Sol–gel based wear resistant coatings are presented as an alternative to existing vapor deposition coatings. The films consist of zirconia which has been doped with 8 wt.% silica. Crack-free single as well as multilayer coatings with thicknesses of 80 and 150 nm, respectively, could be produced after sintering at 1000 °C. The evolution of layer thickness, optical, chemical and mechanical properties during film annealing was investigated by ellipsometry, scanning electron microscopy, thermal gravimetric analysis, Fourier transform infrared spectroscopy, X-ray diffraction, nanoindentation and micro-abrasion. Micro-abrasion has been established as an easy and powerful tool to achieve first comparative abrasion data which could be correlated to hardness, Young's modulus and structure of the films. Above 600 °C a tetragonal, oxide coating with a Young's modulus ranging from 80 to 90 GPa, a hardness from 7 to 8 GPa and an increased abrasion resistance was obtained. The film density reached 4.64 g/cm3 with the mean refractive index n550 nm lying between 1.88 and 1.93.

Item Type: Article
Erschienen: 2013
Creators: Uhlmann, Ina ; Hawelka, Dominik ; Hildebrandt, Erwin ; Pradella, Jens ; Rödel, Jürgen
Type of entry: Bibliographie
Title: Structure and mechanical properties of silica doped zirconia thin films
Language: English
Date: 1 January 2013
Publisher: Elsevier Science Publishing
Journal or Publication Title: Thin Solid Films
Volume of the journal: 527
DOI: 10.1016/j.tsf.2012.08.007
Abstract:

Sol–gel based wear resistant coatings are presented as an alternative to existing vapor deposition coatings. The films consist of zirconia which has been doped with 8 wt.% silica. Crack-free single as well as multilayer coatings with thicknesses of 80 and 150 nm, respectively, could be produced after sintering at 1000 °C. The evolution of layer thickness, optical, chemical and mechanical properties during film annealing was investigated by ellipsometry, scanning electron microscopy, thermal gravimetric analysis, Fourier transform infrared spectroscopy, X-ray diffraction, nanoindentation and micro-abrasion. Micro-abrasion has been established as an easy and powerful tool to achieve first comparative abrasion data which could be correlated to hardness, Young's modulus and structure of the films. Above 600 °C a tetragonal, oxide coating with a Young's modulus ranging from 80 to 90 GPa, a hardness from 7 to 8 GPa and an increased abrasion resistance was obtained. The film density reached 4.64 g/cm3 with the mean refractive index n550 nm lying between 1.88 and 1.93.

Uncontrolled Keywords: Sol–gel, ZrO2, SiO2, Wear, Hardness, Crystal structure, Micro abrasion, Ball cratering
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Advanced Thin Film Technology
11 Department of Materials and Earth Sciences > Material Science > Nonmetallic-Inorganic Materials
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 07 Feb 2014 10:21
Last Modified: 07 Feb 2014 10:21
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Funders: This work was financially supported by the BMBF (Bundesministerium für Bildung und Forschung, Support Code 13N9661).
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