Eicher, D. ; Schlaak, Helmut F. (2007)
Elektrothermische Aktoren aus SU-8 für den Einsatz in miniaturisierten Schrittantrieben.
Conference or Workshop Item
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 2007 |
| Creators: | Eicher, D. ; Schlaak, Helmut F. |
| Type of entry: | Bibliographie |
| Title: | Elektrothermische Aktoren aus SU-8 für den Einsatz in miniaturisierten Schrittantrieben. |
| Language: | German |
| Date: | 1 January 2007 |
| Series: | Proceedings Mikrosystemtechnik-Kongress 2007, 15.-17. Oktober 2007, Dresden. 2007 , S. 195-198 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Microtechnology and Electromechanical Systems 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design (dissolved 18.12.2018) |
| Date Deposited: | 19 Nov 2008 16:01 |
| Last Modified: | 19 Apr 2016 08:13 |
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