Greiner, Felix ; Schlaak, Helmut F. (2012):
Cleanroom Laboratory for Micro- and Nanotechnology.
In: Book of Abstracts on 4th International Target Fabrication Workshop, p. 100,
Mainz, [Conference or Workshop Item]
URL / URN: http://targetfabrication.com/index.html
Item Type: | Conference or Workshop Item |
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Erschienen: | 2012 |
Creators: | Greiner, Felix ; Schlaak, Helmut F. |
Title: | Cleanroom Laboratory for Micro- and Nanotechnology |
Language: | English |
Book Title: | Book of Abstracts on 4th International Target Fabrication Workshop |
Place of Publication: | Mainz |
Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design (dissolved 18.12.2018) 18 Department of Electrical Engineering and Information Technology > Microtechnology and Electromechanical Systems |
Date Deposited: | 04 Sep 2012 13:12 |
URL / URN: | http://targetfabrication.com/index.html |
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