Probst, Daniel ; Hoche, Holger ; Zhou, Yanping ; Hauser, Ralf ; Stelzner, Thomas ; Scheerer, Herbert ; Broszeit, Erhard ; Berger, Christina ; Riedel, Ralf ; Stafast, Herbert ; Kroke, Edwin (2005)
Development of PE-CVD Si/C/N:H films for tribological and corrosive complex-load conditions.
In: Surface and Coatings Technology, 200 (1-4)
doi: 10.1016/j.surfcoat.2005.02.111
Article, Bibliographie
Abstract
Amorphous Si/C/N:H where synthesized by plasma enhanced chemical vapor deposition (PE-CVD) using the single-source precursors hexamethyldisilazane (HMDS) and bis(trimethylsilyl)carbodiimide (BTSC). The films produced using the HMDS precursor were rich in carbon, while the films synthesized from the BTSC precursor were high in nitrogen content. All films were amorphous and exhibited a similar hardness to SiC or Si3N4. Fundamental properties of the films were determined in tests such as ultra micro-hardness, elastic modulus, thickness and adhesion. To investigate the composition of the films, composition depth profiles were determined by GDOES. The wear behaviour was studied in sliding tests under oscillating motion. To investigate the wear mechanisms, the wear tracks were examined with topographical analysis, REM as well as EDX.
| Item Type: | Article |
|---|---|
| Erschienen: | 2005 |
| Creators: | Probst, Daniel ; Hoche, Holger ; Zhou, Yanping ; Hauser, Ralf ; Stelzner, Thomas ; Scheerer, Herbert ; Broszeit, Erhard ; Berger, Christina ; Riedel, Ralf ; Stafast, Herbert ; Kroke, Edwin |
| Type of entry: | Bibliographie |
| Title: | Development of PE-CVD Si/C/N:H films for tribological and corrosive complex-load conditions |
| Language: | English |
| Date: | 1 October 2005 |
| Publisher: | Elsevier |
| Journal or Publication Title: | Surface and Coatings Technology |
| Volume of the journal: | 200 |
| Issue Number: | 1-4 |
| DOI: | 10.1016/j.surfcoat.2005.02.111 |
| Abstract: | Amorphous Si/C/N:H where synthesized by plasma enhanced chemical vapor deposition (PE-CVD) using the single-source precursors hexamethyldisilazane (HMDS) and bis(trimethylsilyl)carbodiimide (BTSC). The films produced using the HMDS precursor were rich in carbon, while the films synthesized from the BTSC precursor were high in nitrogen content. All films were amorphous and exhibited a similar hardness to SiC or Si3N4. Fundamental properties of the films were determined in tests such as ultra micro-hardness, elastic modulus, thickness and adhesion. To investigate the composition of the films, composition depth profiles were determined by GDOES. The wear behaviour was studied in sliding tests under oscillating motion. To investigate the wear mechanisms, the wear tracks were examined with topographical analysis, REM as well as EDX. |
| Uncontrolled Keywords: | SiCN, PA-CVD, PE-CVD, Mechanical properties, Tribology |
| Divisions: | 11 Department of Materials and Earth Sciences 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences > Material Science > Dispersive Solids 16 Department of Mechanical Engineering 16 Department of Mechanical Engineering > Center for Engineering Materials, State Materials Testing Institute Darmstadt (MPA) Chair and Institute for Materials Technology (IfW) |
| Date Deposited: | 20 Apr 2012 11:22 |
| Last Modified: | 30 Jan 2019 11:34 |
| PPN: | |
| Funders: | Financial support for the joint research project by the German Research Foundation, DFG (Bonn), in the framework of the priority program 1119 “Inorganic Materials by Gas Phase Synthesis” is gratefully acknowledged. |
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