Hoche, Holger ; Allebrandt, Daniel ; Riedel, Ralf ; Fasel, Claudia (2009)
Development of Graded Low Friction SiCN Coatings with Extended High Temperature Stability above 1 200 °C.
In: Plasma Processes and Polymers, 6 (S1)
Article
Abstract
The authors developed a coating concept based on amorphous Si/C/N coatings, with promising high temperature properties. Due to a graded coating design, the adhesion, the coating hardness as well as the coefficient of friction were optimized. The coatings showed excellent high temperature stability against chemical decomposition, structural changes and surface oxidation up to 1 350 °C. To allow the deposition of coatings with a certain chemical composition, a numerical relationship between the composition of the coatings and the deposition parameters was established.
| Item Type: | Article |
|---|---|
| Erschienen: | 2009 |
| Creators: | Hoche, Holger ; Allebrandt, Daniel ; Riedel, Ralf ; Fasel, Claudia |
| Type of entry: | Bibliographie |
| Title: | Development of Graded Low Friction SiCN Coatings with Extended High Temperature Stability above 1 200 °C |
| Language: | English |
| Date: | June 2009 |
| Publisher: | Wiley |
| Journal or Publication Title: | Plasma Processes and Polymers |
| Volume of the journal: | 6 |
| Issue Number: | S1 |
| URL / URN: | http://dx.doi.org/10.1002/ppap.200931709 |
| Abstract: | The authors developed a coating concept based on amorphous Si/C/N coatings, with promising high temperature properties. Due to a graded coating design, the adhesion, the coating hardness as well as the coefficient of friction were optimized. The coatings showed excellent high temperature stability against chemical decomposition, structural changes and surface oxidation up to 1 350 °C. To allow the deposition of coatings with a certain chemical composition, a numerical relationship between the composition of the coatings and the deposition parameters was established. |
| Uncontrolled Keywords: | degradation, physical vapour deposition (PVD), SiCN, thermal properties |
| Identification Number: | doi:10.1002/ppap.200931709 |
| Divisions: | 11 Department of Materials and Earth Sciences > Material Science > Dispersive Solids 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences |
| Date Deposited: | 13 Apr 2012 10:47 |
| Last Modified: | 05 Mar 2013 10:00 |
| PPN: | |
| Funders: | The authors acknowledge the financial support of the German Research Foundation (DFG), Project no. HO3315-5-1. |
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