Gierl, C. ; Gruendl, T. ; Debernardi, P. ; Zogal, K. ; Grasse, C. ; Davani, H. A. ; Böhm, G. ; Jatta, S. ; Küppers, F. ; Meißner, P. ; Amann, M.-C. (2011)
Surface micromachined tunable 1.55 µm-VCSEL with 102 nm continuous single-mode tuning.
In: Optics Express, 19 (18)
Article, Bibliographie
Abstract
For the first time a vertical-cavity surface-emitting laser (VCSEL) with a single-mode wavelength-tuning over 102nm in the range of 1550nm is demonstrated. The fiber-coupled optical output power has a maximum of 3.5mW and is \textgreater 2mW over the entire tuning range. The sidemode suppression ratios are \textgreater 45dB. The wavelength tuning is achieved with the micro-electro mechanical actuation of a mirror membrane fabricated with surface micro-machining for on-wafer mass production. The mirror membrane consists of low cost dielectric materials (SiOx/SiNy) deposited with low temperature (\textless 100 °C) Plasma Enhanced Chemical Vapor Deposition (PECVD).
| Item Type: | Article |
|---|---|
| Erschienen: | 2011 |
| Creators: | Gierl, C. ; Gruendl, T. ; Debernardi, P. ; Zogal, K. ; Grasse, C. ; Davani, H. A. ; Böhm, G. ; Jatta, S. ; Küppers, F. ; Meißner, P. ; Amann, M.-C. |
| Type of entry: | Bibliographie |
| Title: | Surface micromachined tunable 1.55 µm-VCSEL with 102 nm continuous single-mode tuning |
| Language: | English |
| Date: | 2011 |
| Journal or Publication Title: | Optics Express |
| Volume of the journal: | 19 |
| Issue Number: | 18 |
| URL / URN: | http://www.opticsexpress.org/abstract.cfm?URI=oe-19-18-17336 |
| Abstract: | For the first time a vertical-cavity surface-emitting laser (VCSEL) with a single-mode wavelength-tuning over 102nm in the range of 1550nm is demonstrated. The fiber-coupled optical output power has a maximum of 3.5mW and is \textgreater 2mW over the entire tuning range. The sidemode suppression ratios are \textgreater 45dB. The wavelength tuning is achieved with the micro-electro mechanical actuation of a mirror membrane fabricated with surface micro-machining for on-wafer mass production. The mirror membrane consists of low cost dielectric materials (SiOx/SiNy) deposited with low temperature (\textless 100 °C) Plasma Enhanced Chemical Vapor Deposition (PECVD). |
| Uncontrolled Keywords: | Lasers, tunable, Optical microelectromechanical devices, Vertical cavity surface emitting lasers |
| Divisions: | 18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics (IMP) > Photonics and Optical Communications 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics (IMP) |
| Date Deposited: | 08 Mar 2012 16:16 |
| Last Modified: | 05 Aug 2013 12:49 |
| PPN: | |
| Export: | |
| Suche nach Titel in: | TUfind oder in Google |
 |
Send an inquiry |
Options (only for editors)
 |
Show editorial Details |
Drucken
Impressum