Schlaak, Helmut F. ; Werthschützky, Roland ; Eicher, D. ; Röse, Andreas ; Rausch, Jacqueline ; Stöhr, Ingmar (2007)
Im Kleinen ganz groß : mikroelektromechanische Systeme.
In: thema Forschung. Technische Universität Darmstadt, 12
Article
| Item Type: | Article |
|---|---|
| Erschienen: | 2007 |
| Creators: | Schlaak, Helmut F. ; Werthschützky, Roland ; Eicher, D. ; Röse, Andreas ; Rausch, Jacqueline ; Stöhr, Ingmar |
| Type of entry: | Bibliographie |
| Title: | Im Kleinen ganz groß : mikroelektromechanische Systeme |
| Language: | German |
| Date: | 1 January 2007 |
| Journal or Publication Title: | thema Forschung. Technische Universität Darmstadt |
| Volume of the journal: | 12 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design (dissolved 18.12.2018) 18 Department of Electrical Engineering and Information Technology > Microtechnology and Electromechanical Systems 18 Department of Electrical Engineering and Information Technology > Measurement and Sensor Technology |
| Date Deposited: | 19 Nov 2008 16:01 |
| Last Modified: | 03 Jan 2021 16:08 |
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