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Surface Energy Controlled Preferential Orientation of Thin Films

Körber, Christoph ; Suffner, Jens ; Klein, Andreas (2010):
Surface Energy Controlled Preferential Orientation of Thin Films.
In: Journal of Physics D: Applied Physics, 43 (5), pp. 055301. IOP Publishing, ISSN 0022-3727,
[Article]

Abstract

The preferred crystalline orientation of magnetron sputtered transparent conducting SnO2 : Sb thin films is controlled by the oxygen content in the sputter gas. Reducing conditions, given by a low oxygen content in the sputter gas, result in a (1 0 1) orientation, while oxidizing conditions result in a (1 1 0) orientation. The change in orientation is accompanied by a transition from reduced to oxidized surface termination and explained by the dependence of surface energy on orientation and oxygen partial pressure given in Batzill and Diebold

Item Type: Article
Erschienen: 2010
Creators: Körber, Christoph ; Suffner, Jens ; Klein, Andreas
Title: Surface Energy Controlled Preferential Orientation of Thin Films
Language: English
Abstract:

The preferred crystalline orientation of magnetron sputtered transparent conducting SnO2 : Sb thin films is controlled by the oxygen content in the sputter gas. Reducing conditions, given by a low oxygen content in the sputter gas, result in a (1 0 1) orientation, while oxidizing conditions result in a (1 1 0) orientation. The change in orientation is accompanied by a transition from reduced to oxidized surface termination and explained by the dependence of surface energy on orientation and oxygen partial pressure given in Batzill and Diebold

Journal or Publication Title: Journal of Physics D: Applied Physics
Journal volume: 43
Number: 5
Publisher: IOP Publishing
Divisions: 11 Department of Materials and Earth Sciences > Material Science > Joint Research Laboratory Nanomaterials
11 Department of Materials and Earth Sciences > Material Science > Surface Science
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences
Date Deposited: 29 Oct 2011 08:09
Identification Number: doi:10.1088/0022-3727/43/5/055301
Funders: This work has been supported by the German Science Foundation (contract No KL1225/4).
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