Kurbatov, D. ; Opanasyuk, A. ; Duvanov, S. M. ; Balogh, A. G. ; Khlyap, H. (2011)
Growth kinetics and stoichiometry of ZnS films obtained by close-spaced vacuum sublimation technique.
In: Solid State Sciences, 13 (5)
Article, Bibliographie
Abstract
Surface roughness, stoichiometry, deposition rates and activation energy of different growth mechanisms of zinc sulfide films are investigated. The films were deposited onto glass-ceramic substrates by close-spaced vacuum sublimation technique (CSVS) at different deposition temperatures. Rutherford backscattering spectroscopy (RBS) using helium ions with 1.8 MeV energy and EDAX method were applied for determination of film thickness and stoichiometry. The effect of the deposition temperature on film properties has been studied.
| Item Type: | Article |
|---|---|
| Erschienen: | 2011 |
| Creators: | Kurbatov, D. ; Opanasyuk, A. ; Duvanov, S. M. ; Balogh, A. G. ; Khlyap, H. |
| Type of entry: | Bibliographie |
| Title: | Growth kinetics and stoichiometry of ZnS films obtained by close-spaced vacuum sublimation technique |
| Language: | English |
| Date: | May 2011 |
| Publisher: | Elsevier Science Publishing Company |
| Journal or Publication Title: | Solid State Sciences |
| Volume of the journal: | 13 |
| Issue Number: | 5 |
| URL / URN: | http://www.sciencedirect.com/science/article/pii/S1293255811... |
| Abstract: | Surface roughness, stoichiometry, deposition rates and activation energy of different growth mechanisms of zinc sulfide films are investigated. The films were deposited onto glass-ceramic substrates by close-spaced vacuum sublimation technique (CSVS) at different deposition temperatures. Rutherford backscattering spectroscopy (RBS) using helium ions with 1.8 MeV energy and EDAX method were applied for determination of film thickness and stoichiometry. The effect of the deposition temperature on film properties has been studied. |
| Uncontrolled Keywords: | Deposition rate, Rutherford backscattering spectrometry, Stoichiometry, ZnS films |
| Divisions: | 11 Department of Materials and Earth Sciences > Material Science > Material Analytics 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences |
| Date Deposited: | 25 Jul 2011 13:37 |
| Last Modified: | 05 Mar 2013 09:51 |
| PPN: | |
| Funders: | This work was supported by the Project No 0110U001151 of the Ministry of Science and Education of the Ukraine and Bilateral Co-operation Project UKR05/003 of the Ministry of Science and Education of the Ukraine, and International Büro of BMBF at DLR, Germany. |
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