Schwalke, Udo (2008)
Damascene Metal Gate Technology: A Solution to High-K Gate Stack Challenges?
DPG Spring Meeting. Berlin, Deutschland (25.02.2008-29.02.2008)
Conference or Workshop Item, Bibliographie
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 2008 |
| Creators: | Schwalke, Udo |
| Type of entry: | Bibliographie |
| Title: | Damascene Metal Gate Technology: A Solution to High-K Gate Stack Challenges? |
| Language: | English |
| Date: | 29 February 2008 |
| Event Title: | DPG Spring Meeting |
| Event Location: | Berlin, Deutschland |
| Event Dates: | 25.02.2008-29.02.2008 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
| Date Deposited: | 01 Jul 2011 08:42 |
| Last Modified: | 26 Aug 2018 21:26 |
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