Wirbeleit, F. ; Pedrero, V. ; Thron, D. ; Stephan, R. ; Schwalke, Udo (2008)
Optical Detection of SiN Stress Layer Induced Carrier Mobility Enhancement in Silicon.
Material Research Society (MRS). San Francisco, CA, USA (24.-28.03.2008)
Conference or Workshop Item, Bibliographie
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 2008 |
| Creators: | Wirbeleit, F. ; Pedrero, V. ; Thron, D. ; Stephan, R. ; Schwalke, Udo |
| Type of entry: | Bibliographie |
| Title: | Optical Detection of SiN Stress Layer Induced Carrier Mobility Enhancement in Silicon |
| Language: | English |
| Date: | 28 March 2008 |
| Event Title: | Material Research Society (MRS) |
| Event Location: | San Francisco, CA, USA |
| Event Dates: | 24.-28.03.2008 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
| Date Deposited: | 01 Jul 2011 08:24 |
| Last Modified: | 05 Mar 2013 09:50 |
| PPN: | |
| Export: | |
| Suche nach Titel in: | TUfind oder in Google |
 |
Send an inquiry |
Options (only for editors)
 |
Show editorial Details |
Drucken
Impressum