Lemme, M. C. ; Gottlob, H. D. B. ; Echtermeyer, T. ; Kurz, H. ; Endres, Ralf ; Schwalke, Udo ; Czernohorsky, M. ; Osten, H. J. (2008)
CMOS Integration of Epitaxial Gd2O3.
15th Workshop on Dielectrics in Microelectronics (WoDiM). Bad Saarow, Deutschland (23.-25.06.2008)
Conference or Workshop Item, Bibliographie
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 2008 |
| Creators: | Lemme, M. C. ; Gottlob, H. D. B. ; Echtermeyer, T. ; Kurz, H. ; Endres, Ralf ; Schwalke, Udo ; Czernohorsky, M. ; Osten, H. J. |
| Type of entry: | Bibliographie |
| Title: | CMOS Integration of Epitaxial Gd2O3 |
| Language: | English |
| Date: | 25 June 2008 |
| Event Title: | 15th Workshop on Dielectrics in Microelectronics (WoDiM) |
| Event Location: | Bad Saarow, Deutschland |
| Event Dates: | 23.-25.06.2008 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
| Date Deposited: | 29 Jun 2011 10:32 |
| Last Modified: | 28 Mar 2024 13:48 |
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