Lemme, M. C. ; Gottlob, H. D. B. ; Echtermeyer, T. ; Kurz, H. ; Endres, Ralf ; Schwalke, Udo ; Czernohorsky, M. ; Osten, H. J. (2009)
Complementary Metal Oxide Semiconductor Integration of Epitaxial Gd2O3.
In: Journal of Vacuum Science & Technology B, 27 (1)
Article, Bibliographie
URL / URN: http://dx.doi.org/10.1116/1.3054350
| Item Type: | Article |
|---|---|
| Erschienen: | 2009 |
| Creators: | Lemme, M. C. ; Gottlob, H. D. B. ; Echtermeyer, T. ; Kurz, H. ; Endres, Ralf ; Schwalke, Udo ; Czernohorsky, M. ; Osten, H. J. |
| Type of entry: | Bibliographie |
| Title: | Complementary Metal Oxide Semiconductor Integration of Epitaxial Gd2O3 |
| Language: | English |
| Date: | 24 June 2009 |
| Journal or Publication Title: | Journal of Vacuum Science & Technology B |
| Volume of the journal: | 27 |
| Issue Number: | 1 |
| URL / URN: | http://dx.doi.org/10.1116/1.3054350 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
| Date Deposited: | 29 Jun 2011 09:42 |
| Last Modified: | 05 Mar 2013 09:50 |
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