Schwalke, Udo (2010)
Nanoscale Electrical Characterization at the Wafer Level: Defects in High-k Dielectrics.
VDE-Fachgruppentagung 8.5.6 - fWLR / Wafer Level Reliability. Erfurt, Deutschland (17.-18.05.2010)
Conference or Workshop Item, Bibliographie
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 2010 |
| Creators: | Schwalke, Udo |
| Type of entry: | Bibliographie |
| Title: | Nanoscale Electrical Characterization at the Wafer Level: Defects in High-k Dielectrics |
| Language: | English |
| Date: | 18 May 2010 |
| Event Title: | VDE-Fachgruppentagung 8.5.6 - fWLR / Wafer Level Reliability |
| Event Location: | Erfurt, Deutschland |
| Event Dates: | 17.-18.05.2010 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
| Date Deposited: | 28 Jun 2011 10:15 |
| Last Modified: | 22 May 2013 13:50 |
| PPN: | |
| Export: | |
| Suche nach Titel in: | TUfind oder in Google |
 |
Send an inquiry |
Options (only for editors)
 |
Show editorial Details |
Drucken
Impressum