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CMOS-compatible Fabrication Process of Carbon-Nanotube-Field-Effect Transistors

Rispal, Lorraine ; Wessely, Frank ; Stefanov, Yordan ; Ruland, Tino ; Schwalke, Udo (2006)
CMOS-compatible Fabrication Process of Carbon-Nanotube-Field-Effect Transistors.
IEEE EDS Workshop on Advanced Electron Devices. Fraunhofer-Institut IMS, Duisburg, Deutschland (13.-14.06.2006)
Conference or Workshop Item, Bibliographie

Item Type: Conference or Workshop Item
Erschienen: 2006
Creators: Rispal, Lorraine ; Wessely, Frank ; Stefanov, Yordan ; Ruland, Tino ; Schwalke, Udo
Type of entry: Bibliographie
Title: CMOS-compatible Fabrication Process of Carbon-Nanotube-Field-Effect Transistors
Language: English
Date: 14 June 2006
Event Title: IEEE EDS Workshop on Advanced Electron Devices
Event Location: Fraunhofer-Institut IMS, Duisburg, Deutschland
Event Dates: 13.-14.06.2006
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Date Deposited: 28 Jun 2011 06:06
Last Modified: 05 Mar 2013 09:50
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