Endres, Ralf ; Stefanov, Yordan ; Schwalke, Udo (2006)
Electrical Performance of Damascene Metal Gate MOSFETs with Crystalline Gd2O3 Gate Dielectric.
37th IEEE Semiconductor Interface Specialists Conference (SISC). San Diego, CA, USA (07.-09.12.2006)
Conference or Workshop Item, Bibliographie
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 2006 |
| Creators: | Endres, Ralf ; Stefanov, Yordan ; Schwalke, Udo |
| Type of entry: | Bibliographie |
| Title: | Electrical Performance of Damascene Metal Gate MOSFETs with Crystalline Gd2O3 Gate Dielectric |
| Language: | English |
| Date: | 9 December 2006 |
| Event Title: | 37th IEEE Semiconductor Interface Specialists Conference (SISC) |
| Event Location: | San Diego, CA, USA |
| Event Dates: | 07.-09.12.2006 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
| Date Deposited: | 27 Jun 2011 14:09 |
| Last Modified: | 22 May 2013 14:09 |
| PPN: | |
| Export: | |
| Suche nach Titel in: | TUfind oder in Google |
 |
Send an inquiry |
Options (only for editors)
 |
Show editorial Details |
Drucken
Impressum