Radecka, M. ; Pamula, E. ; Trenczek-Zajac, A. ; Zakrzewska, K. ; Brudnik, A. ; Kusior, E. ; Kim-Ngan, N.-T. H. ; Balogh, A. G. (2011)
Chemical composition, crystallographic structure and impedance spectroscopy of titanium oxynitride TiNxOy thin films.
In: Solid State Ionics, 192 (1)
Article, Bibliographie
Abstract
Titanium oxynitride TiNxOy thin films have been deposited by DC-pulsed magnetron sputtering from Ti target in the Ar + N2 + O2 reactive atmosphere controlled by plasma emission spectroscopy. Correlation between chemical composition and crystallographic structure of thin films has been determined and presented in the form of the pseudo-equilibrium ternary phase diagram. The atomic N/Ti and O/Ti ratios have been derived from Rutherford backscattering (RBS) measurements. X-ray diffraction at grazing incidence has revealed formation of defective TiN-TiO solid solutions. The surface roughness estimated from atomic force microscopy (AFM) surface images decreases with increasing oxygen content in the films, in accordance with the progressive sample amorphisation. Impedance spectroscopy measurements indicate that the electrical conductivity changes its character from metallic to semiconducting with increasing oxygen content in TiNxOy thin films.
| Item Type: | Article |
|---|---|
| Erschienen: | 2011 |
| Creators: | Radecka, M. ; Pamula, E. ; Trenczek-Zajac, A. ; Zakrzewska, K. ; Brudnik, A. ; Kusior, E. ; Kim-Ngan, N.-T. H. ; Balogh, A. G. |
| Type of entry: | Bibliographie |
| Title: | Chemical composition, crystallographic structure and impedance spectroscopy of titanium oxynitride TiNxOy thin films |
| Language: | English |
| Date: | 16 June 2011 |
| Publisher: | Elsevier Science Publishing Company |
| Journal or Publication Title: | Solid State Ionics |
| Volume of the journal: | 192 |
| Issue Number: | 1 |
| URL / URN: | http://www.sciencedirect.com/science/article/pii/S0167273810... |
| Abstract: | Titanium oxynitride TiNxOy thin films have been deposited by DC-pulsed magnetron sputtering from Ti target in the Ar + N2 + O2 reactive atmosphere controlled by plasma emission spectroscopy. Correlation between chemical composition and crystallographic structure of thin films has been determined and presented in the form of the pseudo-equilibrium ternary phase diagram. The atomic N/Ti and O/Ti ratios have been derived from Rutherford backscattering (RBS) measurements. X-ray diffraction at grazing incidence has revealed formation of defective TiN-TiO solid solutions. The surface roughness estimated from atomic force microscopy (AFM) surface images decreases with increasing oxygen content in the films, in accordance with the progressive sample amorphisation. Impedance spectroscopy measurements indicate that the electrical conductivity changes its character from metallic to semiconducting with increasing oxygen content in TiNxOy thin films. |
| Uncontrolled Keywords: | Impedance spectroscopy, Rutherford backscattering, Thin films, Titanium oxynitrides |
| Additional Information: | Proceedings of the 17th International Conference on Solid State Ionics |
| Divisions: | 11 Department of Materials and Earth Sciences > Material Science > Material Analytics 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences |
| Date Deposited: | 15 Jun 2011 14:52 |
| Last Modified: | 05 Mar 2013 09:48 |
| PPN: | |
| Funders: | The financial support of the Polish Ministry of Education and Science (2009-2012) within the project NN515 080 637 is highly acknowledged., Ion Beam Analysis were performed within the scope of DAAD project D/08/07729 between Poland and Germany and MNiSW project No. 651/N-DAAD/2010/0., One of the authors (A.T.-Z.) would like to kindly acknowledge the Foundation of Polish Science for financial support. |
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