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Inorganic electret membrane for a silicon-microphone

Thielemann, Christiane ; Heß, ; Heß, (1996)
Inorganic electret membrane for a silicon-microphone.
Conference or Workshop Item

Item Type: Conference or Workshop Item
Erschienen: 1996
Creators: Thielemann, Christiane ; Heß, ; Heß,
Type of entry: Bibliographie
Title: Inorganic electret membrane for a silicon-microphone
Language: English
Date: 1 January 1996
Place of Publication: Heverlee, Belgium
Publisher: Catholic Univ. Leuven
Series: Proceedings of Eurosensors X, the 10th European Conference on Solid-State Transducers, Sept. 1996, Leuven, Belgium. S. 1097-1100
Edition: Heverlee, Belgium: Catholic Univ. Leuven, 1996
Divisions: 18 Department of Electrical Engineering and Information Technology
Date Deposited: 19 Nov 2008 16:00
Last Modified: 05 Mar 2013 08:35
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