Klemberg-Sapieha, J. (1996):
Plasma deposition of low-stress electret films on electroacoustic and solar cell application.
In: Journal of vacuum science and technology. A 14 (1996), No. 5, S. 2745-2780, [Article]
| Item Type: | Article |
|---|---|
| Erschienen: | 1996 |
| Creators: | Klemberg-Sapieha, J. |
| Title: | Plasma deposition of low-stress electret films on electroacoustic and solar cell application |
| Language: | English |
| Journal or Publication Title: | Journal of vacuum science and technology. A 14 (1996), No. 5, S. 2745-2780 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology |
| Date Deposited: | 19 Nov 2008 16:00 |
| License: | [undefiniert] |
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| Suche nach Titel in: | TUfind oder in Google |
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