Peter, D. ; Dalmer, M. ; Kruwinus, H. ; Lechner, A. ; Archer, L. ; Gaulhofer, E. ; Gigler, A. M. ; Stark, R. W. ; Bensch, W. (2009):
Measurement of the mechanical stability of semiconductor line structures in relevant media.
In: Vol. 16, iss. 4, In: ECS Trans, p. 13,
[Conference or Workshop Item]
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 2009 |
| Creators: | Peter, D. ; Dalmer, M. ; Kruwinus, H. ; Lechner, A. ; Archer, L. ; Gaulhofer, E. ; Gigler, A. M. ; Stark, R. W. ; Bensch, W. |
| Title: | Measurement of the mechanical stability of semiconductor line structures in relevant media |
| Language: | English |
| Book Title: | ECS Trans |
| Series: | Vol. 16 |
| Series Volume: | iss. 4 |
| Divisions: | ?? fb99_csi~fg5 ?? UNSPECIFIED Zentrale Einrichtungen |
| Date Deposited: | 05 Jul 2010 07:30 |
| Identification Number: | doi:10.1149/1.3108349 |
| PPN: | |
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