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Ion beam assisted deposition of ZrO2 thin films

Neubeck, Klaus ; Nitsche, R. ; Hahn, H. ; Alberts, L. ; Wolf, G. K. ; Friz, M. (1995)
Ion beam assisted deposition of ZrO2 thin films.
In: Nuclear instruments and methods in physics research B, 106 (1-4)
doi: 10.1016/0168-583X(95)00687-7
Article

Item Type: Article
Erschienen: 1995
Creators: Neubeck, Klaus ; Nitsche, R. ; Hahn, H. ; Alberts, L. ; Wolf, G. K. ; Friz, M.
Type of entry: Bibliographie
Title: Ion beam assisted deposition of ZrO2 thin films
Language: English
Date: 2 December 1995
Publisher: Elsevier
Journal or Publication Title: Nuclear instruments and methods in physics research B
Volume of the journal: 106
Issue Number: 1-4
DOI: 10.1016/0168-583X(95)00687-7
Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Department of Earth Sciences (1999 merged into Department of Materials and Earth Sciences)
Date Deposited: 19 Nov 2008 15:58
Last Modified: 05 Nov 2021 10:07
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