Urban, J. ; Bräuer, S. ; McKinnon, A. W. ; Horn, J. ; Hjort, K. ; Pagnia, H. ; Koops, H. W. P. ; Hartnagel, H. L. (1995)
The scanning tunneling microscope as a tool for nanolithography: writing nanostructures on Si (110) in air.
In: Microelectronic Engineering, 27 (1/4)
Article, Bibliographie
| Item Type: | Article |
|---|---|
| Erschienen: | 1995 |
| Creators: | Urban, J. ; Bräuer, S. ; McKinnon, A. W. ; Horn, J. ; Hjort, K. ; Pagnia, H. ; Koops, H. W. P. ; Hartnagel, H. L. |
| Type of entry: | Bibliographie |
| Title: | The scanning tunneling microscope as a tool for nanolithography: writing nanostructures on Si (110) in air |
| Language: | English |
| Date: | 1995 |
| Publisher: | Elsevier |
| Journal or Publication Title: | Microelectronic Engineering |
| Volume of the journal: | 27 |
| Issue Number: | 1/4 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Microwave Electronics |
| Date Deposited: | 19 Nov 2008 15:58 |
| Last Modified: | 26 Apr 2024 09:22 |
| PPN: | |
| Export: | |
| Suche nach Titel in: | TUfind oder in Google |
 |
Send an inquiry |
Options (only for editors)
 |
Show editorial Details |
Drucken
Impressum