Urban, J. ; Bräuer, ; McKinnon, ; Horn, ; Hjort, ; Pagnia, ; Koops, ; Hartnagel, (1995):
The scanning tunneling microscope as a tool for nanolithography: writing nanostructures on Si (110) in air.
In: Microelectronic engineering. 27 (1995), S. 113-116, [Article]
| Item Type: | Article |
|---|---|
| Erschienen: | 1995 |
| Creators: | Urban, J. ; Bräuer, ; McKinnon, ; Horn, ; Hjort, ; Pagnia, ; Koops, ; Hartnagel, |
| Title: | The scanning tunneling microscope as a tool for nanolithography: writing nanostructures on Si (110) in air |
| Language: | English |
| Journal or Publication Title: | Microelectronic engineering. 27 (1995), S. 113-116 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Microwave Electronics |
| Date Deposited: | 19 Nov 2008 15:58 |
| License: | [undefiniert] |
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| Suche nach Titel in: | TUfind oder in Google |
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