Urban, J. ; Bräuer, ; McKinnon, ; Horn, ; Hjort, ; Pagnia, ; Koops, ; Hartnagel, (1995)
The scanning tunneling microscope as a tool for nanolithography: writing nanostructures on Si (110) in air.
In: Microelectronic engineering. 27 (1995), S. 113-116
Article
| Item Type: | Article |
|---|---|
| Erschienen: | 1995 |
| Creators: | Urban, J. ; Bräuer, ; McKinnon, ; Horn, ; Hjort, ; Pagnia, ; Koops, ; Hartnagel, |
| Type of entry: | Bibliographie |
| Title: | The scanning tunneling microscope as a tool for nanolithography: writing nanostructures on Si (110) in air |
| Language: | English |
| Date: | 1 January 1995 |
| Journal or Publication Title: | Microelectronic engineering. 27 (1995), S. 113-116 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Microwave Electronics |
| Date Deposited: | 19 Nov 2008 15:58 |
| Last Modified: | 20 Feb 2020 13:32 |
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