Miao, Jianmin ; Hjort, ; Hartnagel, ; Schweitz, ; Rück, ; Tinschert, (1995):
Resonant sensors on thin semi-insulating GaAs membranes.
In: International Conference on Solid-State Sensors and Actuators: Transducers '95 <8,1995, Stockholm, Schweden>: Digest of techn. papers. S. 406-407, Piscataway, USA: IEEE, 1995, Piscataway, USA, IEEE, [Conference or Workshop Item]
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 1995 |
| Creators: | Miao, Jianmin ; Hjort, ; Hartnagel, ; Schweitz, ; Rück, ; Tinschert, |
| Title: | Resonant sensors on thin semi-insulating GaAs membranes |
| Language: | English |
| Series: | International Conference on Solid-State Sensors and Actuators: Transducers '95 <8,1995, Stockholm, Schweden>: Digest of techn. papers. S. 406-407 |
| Place of Publication: | Piscataway, USA |
| Publisher: | IEEE |
| Edition: | Piscataway, USA: IEEE, 1995 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Microwave Electronics |
| Date Deposited: | 19 Nov 2008 15:58 |
| License: | [undefiniert] |
| Export: | |
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