Miao, Jianmin ; Hartnagel, Hans L. ; Weiss, B. L. ; Wilson, R. J. (1995)
Fabrication of free-standing membranes in n-GaAs using MeV nitrogen implantation for sensors.
Fall meeting of Materials Research Society. Boston, Mass. (27.11.1995-01.12.1995)
Conference or Workshop Item, Bibliographie
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 1995 |
| Creators: | Miao, Jianmin ; Hartnagel, Hans L. ; Weiss, B. L. ; Wilson, R. J. |
| Type of entry: | Bibliographie |
| Title: | Fabrication of free-standing membranes in n-GaAs using MeV nitrogen implantation for sensors |
| Language: | English |
| Date: | 1995 |
| Book Title: | Fall meeting of Materials Research Society, 1995, Boston, USA : Proceedings |
| Event Title: | Fall meeting of Materials Research Society |
| Event Location: | Boston, Mass. |
| Event Dates: | 27.11.1995-01.12.1995 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Microwave Electronics |
| Date Deposited: | 19 Nov 2008 15:58 |
| Last Modified: | 13 Dec 2023 17:54 |
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