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Infrared thermopile sensor based on AlGaAs/GaAs micromachining

Dehé, Alfons ; Fricke, K. ; Hartnagel, Hans L. (1995)
Infrared thermopile sensor based on AlGaAs/GaAs micromachining.
In: Sensors and Actuators A : Physical, 47 (1/3)
doi: 10.1016/0924-4247(94)00936-C
Article, Bibliographie

Item Type: Article
Erschienen: 1995
Creators: Dehé, Alfons ; Fricke, K. ; Hartnagel, Hans L.
Type of entry: Bibliographie
Title: Infrared thermopile sensor based on AlGaAs/GaAs micromachining
Language: English
Date: 1995
Publisher: Elsevier
Journal or Publication Title: Sensors and Actuators A : Physical
Volume of the journal: 47
Issue Number: 1/3
DOI: 10.1016/0924-4247(94)00936-C
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Microwave Electronics
Date Deposited: 19 Nov 2008 15:58
Last Modified: 22 Jul 2024 06:31
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