Dehé, Alfons ; Fricke, ; Mutamba, ; Hartnagel, (1995)
Piezoresistive GaAs differential pressure sensor with AlGaAs membrane technology.
In: Journal of micromechanics and microengineering. 5 (1995), S. 1-4
Article
| Item Type: | Article |
|---|---|
| Erschienen: | 1995 |
| Creators: | Dehé, Alfons ; Fricke, ; Mutamba, ; Hartnagel, |
| Type of entry: | Bibliographie |
| Title: | Piezoresistive GaAs differential pressure sensor with AlGaAs membrane technology |
| Language: | German |
| Date: | 1 January 1995 |
| Journal or Publication Title: | Journal of micromechanics and microengineering. 5 (1995), S. 1-4 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Microwave Electronics |
| Date Deposited: | 19 Nov 2008 15:58 |
| Last Modified: | 20 Feb 2020 13:32 |
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