Dehé, Alfons ; Fricke, ; Mutamba, ; Hartnagel, (1995):
Piezoresistive GaAs differential pressure sensor with AlGaAs membrane technology.
In: Journal of micromechanics and microengineering. 5 (1995), S. 1-4, [Article]
Item Type: | Article |
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Erschienen: | 1995 |
Creators: | Dehé, Alfons ; Fricke, ; Mutamba, ; Hartnagel, |
Title: | Piezoresistive GaAs differential pressure sensor with AlGaAs membrane technology |
Language: | German |
Journal or Publication Title: | Journal of micromechanics and microengineering. 5 (1995), S. 1-4 |
Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Microwave Electronics |
Date Deposited: | 19 Nov 2008 15:58 |
License: | [undefiniert] |
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