Wessely, Frank ; Ruland, Tino ; Schwalke, Udo (2007)
Characterization of Carbon Nanotube Field Effect Transistor (CNTFET) Fabrication Process by Atomic Force Microscopy (AFM) and Conductive-AFM.
European Congress on Advanced Materials and Processes (EUROMAT). Nürnberg, Deutschland (10.-13.09.2007)
Conference or Workshop Item, Bibliographie
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 2007 |
| Creators: | Wessely, Frank ; Ruland, Tino ; Schwalke, Udo |
| Type of entry: | Bibliographie |
| Title: | Characterization of Carbon Nanotube Field Effect Transistor (CNTFET) Fabrication Process by Atomic Force Microscopy (AFM) and Conductive-AFM |
| Language: | English |
| Date: | 13 September 2007 |
| Event Title: | European Congress on Advanced Materials and Processes (EUROMAT) |
| Event Location: | Nürnberg, Deutschland |
| Event Dates: | 10.-13.09.2007 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
| Date Deposited: | 20 Nov 2008 08:28 |
| Last Modified: | 05 Mar 2013 09:15 |
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