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Mix-and-Match Lithography Based Ultrathin-body SOI Nanowires and Schottky-S/D-FETs

Wessely, Frank ; Rispal, Lorraine ; Schwalke, Udo (2007)
Mix-and-Match Lithography Based Ultrathin-body SOI Nanowires and Schottky-S/D-FETs.
In: Proceedings of Semiconductor Advances for Future Electronics (SAFE)
Article, Bibliographie

Item Type: Article
Erschienen: 2007
Creators: Wessely, Frank ; Rispal, Lorraine ; Schwalke, Udo
Type of entry: Bibliographie
Title: Mix-and-Match Lithography Based Ultrathin-body SOI Nanowires and Schottky-S/D-FETs
Language: English
Date: 30 September 2007
Journal or Publication Title: Proceedings of Semiconductor Advances for Future Electronics (SAFE)
URL / URN: http://www.stw.nl/NR/rdonlyres/ADD2FB2C-3AD4-4D1E-BA0A-1EAEA...
Additional Information:

10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE), Veldhoven, Niederlande, 29.-30.09.2007

Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Date Deposited: 20 Nov 2008 08:28
Last Modified: 08 May 2024 09:07
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