Steinmann, Ralf ; Friemann, ; Prescher, ; Schellin, (1995):
Mechanical behaviour of micromachined sensor membranes under uniform external pressure affected by in-plane stresses using a Ritz method and Hermite polynomials.
In: Sensors and actuators. A48 (1995), S. 37-46, [Article]
| Item Type: | Article |
|---|---|
| Erschienen: | 1995 |
| Creators: | Steinmann, Ralf ; Friemann, ; Prescher, ; Schellin, |
| Title: | Mechanical behaviour of micromachined sensor membranes under uniform external pressure affected by in-plane stresses using a Ritz method and Hermite polynomials |
| Language: | English |
| Journal or Publication Title: | Sensors and actuators. A48 (1995), S. 37-46 |
| Divisions: | 13 Department of Civil and Environmental Engineering Sciences |
| Date Deposited: | 19 Nov 2008 15:57 |
| License: | [undefiniert] |
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| Suche nach Titel in: | TUfind oder in Google |
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