Steinmann, Ralf ; Friemann, Harald ; Prescher, C. ; Schellin, Ralf (1995)
Mechanical behaviour of micromachined sensor membranes under uniform external pressure affected by in-plane stresses using a Ritz method and Hermite polynomials.
In: Sensors and Actuators A : Physical, 48 (1)
doi: 10.1016/0924-4247(95)00849-7
Article, Bibliographie
| Item Type: | Article |
|---|---|
| Erschienen: | 1995 |
| Creators: | Steinmann, Ralf ; Friemann, Harald ; Prescher, C. ; Schellin, Ralf |
| Type of entry: | Bibliographie |
| Title: | Mechanical behaviour of micromachined sensor membranes under uniform external pressure affected by in-plane stresses using a Ritz method and Hermite polynomials |
| Language: | English |
| Date: | 1995 |
| Publisher: | Elsevier |
| Journal or Publication Title: | Sensors and Actuators A : Physical |
| Volume of the journal: | 48 |
| Issue Number: | 1 |
| DOI: | 10.1016/0924-4247(95)00849-7 |
| Divisions: | 13 Department of Civil and Environmental Engineering Sciences |
| Date Deposited: | 19 Nov 2008 15:57 |
| Last Modified: | 02 Feb 2024 13:12 |
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