Ensinger, Wolfgang ; Volz, Kerstin ; Baba, Koumei ; Hatada, Ruriko (2007)
Diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation with methane/toluene mixtures.
In: Nuclear Instruments and Methods in Physics Research Section B, 257 (1-2)
Article, Bibliographie
Abstract
Plasma immersion ion implantation of silicon with methane, toluene and mixtures of both as plasma-foming gases gave films of amorphous carbon (a-C:H, or diamond-like carbon DLC) on a transition zone of silicon carbide, as shown by X-ray photoelectron spectrometry and Rutherford backscattering spectrometry. Toluene leads to faster DLC film growth than methane. Raman spectra showed the typical D- and G-bands of DLC, in case of toluene more distinct than for toluene. IR-spectroscopy gave indications of SiC and C–H bonds.
| Item Type: | Article |
|---|---|
| Erschienen: | 2007 |
| Creators: | Ensinger, Wolfgang ; Volz, Kerstin ; Baba, Koumei ; Hatada, Ruriko |
| Type of entry: | Bibliographie |
| Title: | Diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation with methane/toluene mixtures |
| Language: | English |
| Date: | April 2007 |
| Publisher: | Elsevier |
| Journal or Publication Title: | Nuclear Instruments and Methods in Physics Research Section B |
| Volume of the journal: | 257 |
| Issue Number: | 1-2 |
| Abstract: | Plasma immersion ion implantation of silicon with methane, toluene and mixtures of both as plasma-foming gases gave films of amorphous carbon (a-C:H, or diamond-like carbon DLC) on a transition zone of silicon carbide, as shown by X-ray photoelectron spectrometry and Rutherford backscattering spectrometry. Toluene leads to faster DLC film growth than methane. Raman spectra showed the typical D- and G-bands of DLC, in case of toluene more distinct than for toluene. IR-spectroscopy gave indications of SiC and C–H bonds. |
| Additional Information: | Ion Beam Modification of Materials — Proceedings of the 15th International Conference on Ion Beam Modification of Materials 15th International Conference on Ion Beam Modification of Materials |
| Divisions: | 11 Department of Materials and Earth Sciences 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences > Material Science > Material Analytics |
| Date Deposited: | 20 Nov 2008 08:28 |
| Last Modified: | 20 Feb 2020 13:23 |
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