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Evaluation of MOSFETs with Crystalline High-k Gate-dielectrics: Device Simulation and Experimental Data

Zaunert, Florian ; Endres, Ralf ; Stefanov, Yordan ; Schwalke, Udo (2006)
Evaluation of MOSFETs with Crystalline High-k Gate-dielectrics: Device Simulation and Experimental Data.
7th Symposium Diagnostics & Yield - Advanced Silicon Devices and Technologies for ULSI Era. Warschau, Polen (25.-28.06.2006)
Conference or Workshop Item, Bibliographie

Item Type: Conference or Workshop Item
Erschienen: 2006
Creators: Zaunert, Florian ; Endres, Ralf ; Stefanov, Yordan ; Schwalke, Udo
Type of entry: Bibliographie
Title: Evaluation of MOSFETs with Crystalline High-k Gate-dielectrics: Device Simulation and Experimental Data
Language: English
Date: 28 June 2006
Event Title: 7th Symposium Diagnostics & Yield - Advanced Silicon Devices and Technologies for ULSI Era
Event Location: Warschau, Polen
Event Dates: 25.-28.06.2006
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Date Deposited: 20 Nov 2008 08:27
Last Modified: 26 Aug 2018 21:24
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