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Approaches to CMOS Integration of Epitaxial Gadolinium Oxide High-K Dielectrics

Gottlob, H. D. B. ; Echtermeyer, T. ; Mollenhauer, T. ; Schmidt, M. ; Efavi, J. ; Wahlbrink, T. ; Lemme, L. M. ; Kurz, H. ; Endres, Ralf ; Stefanov, Yordan ; Schwalke, Udo ; Czernohorsky, M. ; Bugiel, E. ; Fissel, A. ; Osten, H. J. (2006)
Approaches to CMOS Integration of Epitaxial Gadolinium Oxide High-K Dielectrics.
In: Proceedings of the 36th European Solid-State Device Research Conference (ESSDERC)
Article, Bibliographie

Item Type: Article
Erschienen: 2006
Creators: Gottlob, H. D. B. ; Echtermeyer, T. ; Mollenhauer, T. ; Schmidt, M. ; Efavi, J. ; Wahlbrink, T. ; Lemme, L. M. ; Kurz, H. ; Endres, Ralf ; Stefanov, Yordan ; Schwalke, Udo ; Czernohorsky, M. ; Bugiel, E. ; Fissel, A. ; Osten, H. J.
Type of entry: Bibliographie
Title: Approaches to CMOS Integration of Epitaxial Gadolinium Oxide High-K Dielectrics
Language: English
Date: 21 September 2006
Journal or Publication Title: Proceedings of the 36th European Solid-State Device Research Conference (ESSDERC)
URL / URN: http://dx.doi.org/10.1109/ESSDER.2006.307660
Additional Information:

36th European Solid-State Device Research Conference (ESSDERC), Montreux, Schweiz, 19.-21.09.2006

Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Date Deposited: 20 Nov 2008 08:26
Last Modified: 08 May 2024 08:35
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