Stefanov, Yordan ; Schwalke, Udo
ed.: Li, Yuzhuo (2007)
Shallow Trench Isolation Chemical Mechanical Planarization.
In: Microelectronic Applications of Chemical Mechanical Planarization
Book Section, Bibliographie
| Item Type: | Book Section |
|---|---|
| Erschienen: | 2007 |
| Editors: | Li, Yuzhuo |
| Creators: | Stefanov, Yordan ; Schwalke, Udo |
| Type of entry: | Bibliographie |
| Title: | Shallow Trench Isolation Chemical Mechanical Planarization |
| Language: | English |
| Date: | 19 October 2007 |
| Place of Publication: | Hoboken, NJ, USA |
| Publisher: | Wiley |
| Book Title: | Microelectronic Applications of Chemical Mechanical Planarization |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
| Date Deposited: | 20 Nov 2008 08:25 |
| Last Modified: | 05 Mar 2013 09:10 |
| PPN: | |
| Export: | |
| Suche nach Titel in: | TUfind oder in Google |
 |
Send an inquiry |
Options (only for editors)
 |
Show editorial Details |
Drucken
Impressum