| Item Type: |
Article
|
| Erschienen: |
2005 |
| Creators: |
Gottlob, H. D. B. ; Lemme, M. C. ; Mollenhauer, T. ; Wahlbrink, T. ; Efavi, J. K. ; Kurz, H. ; Stefanov, Yordan ; Haberle, Klaus ; Komaragiri, Rama Subrahmanyam ; Ruland, Tino ; Zaunert, Florian ; Schwalke, Udo |
| Type of entry: |
Bibliographie |
| Title: |
Introduction of Crystalline High-k Gate Dielectrics in a CMOS Process |
| Language: |
English |
| Date: |
July 2005 |
| Journal or Publication Title: |
Journal of Non-Crystalline Solids |
| Volume of the journal: |
351 |
| Issue Number: |
21-23 |
| URL / URN: |
http://dx.doi.org/10.1016/j.jnoncrysol.2005.04.032 |
| Divisions: |
18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
| Date Deposited: |
20 Nov 2008 08:24 |
| Last Modified: |
20 Feb 2020 13:24 |
| PPN: |
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| Export: |
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