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Nanoscale Electrical Characterization of Crystalline Praseodymium Oxide High-k Gate Dielectric MOSFETs with Conductive Atomic Force Microscopy

Ruland, Tino ; Endres, Ralf ; Schwalke, Udo (2005)
Nanoscale Electrical Characterization of Crystalline Praseodymium Oxide High-k Gate Dielectric MOSFETs with Conductive Atomic Force Microscopy.
European Congress on Advanced Materials and Processes (EUROMAT). Prag, Tschechien (05.-08.09.2005)
Conference or Workshop Item, Bibliographie

Item Type: Conference or Workshop Item
Erschienen: 2005
Creators: Ruland, Tino ; Endres, Ralf ; Schwalke, Udo
Type of entry: Bibliographie
Title: Nanoscale Electrical Characterization of Crystalline Praseodymium Oxide High-k Gate Dielectric MOSFETs with Conductive Atomic Force Microscopy
Language: English
Date: 8 September 2005
Event Title: European Congress on Advanced Materials and Processes (EUROMAT)
Event Location: Prag, Tschechien
Event Dates: 05.-08.09.2005
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Date Deposited: 20 Nov 2008 08:23
Last Modified: 05 Mar 2013 09:08
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