Ruland, Tino ; Endres, Ralf ; Schwalke, Udo (2005)
Nanoscale Electrical Characterization of Crystalline Praseodymium Oxide High-k Gate Dielectric MOSFETs with Conductive Atomic Force Microscopy.
European Congress on Advanced Materials and Processes (EUROMAT). Prag, Tschechien (05.-08.09.2005)
Conference or Workshop Item, Bibliographie
Item Type: | Conference or Workshop Item |
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Erschienen: | 2005 |
Creators: | Ruland, Tino ; Endres, Ralf ; Schwalke, Udo |
Type of entry: | Bibliographie |
Title: | Nanoscale Electrical Characterization of Crystalline Praseodymium Oxide High-k Gate Dielectric MOSFETs with Conductive Atomic Force Microscopy |
Language: | English |
Date: | 8 September 2005 |
Event Title: | European Congress on Advanced Materials and Processes (EUROMAT) |
Event Location: | Prag, Tschechien |
Event Dates: | 05.-08.09.2005 |
Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
Date Deposited: | 20 Nov 2008 08:23 |
Last Modified: | 05 Mar 2013 09:08 |
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