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Gate Dielectrics: Process Integration Issues and Electrical Properties

Schwalke, Udo (2005)
Gate Dielectrics: Process Integration Issues and Electrical Properties.
In: Journal of Telecommunications and Technology, 1
Article, Bibliographie

Item Type: Article
Erschienen: 2005
Creators: Schwalke, Udo
Type of entry: Bibliographie
Title: Gate Dielectrics: Process Integration Issues and Electrical Properties
Language: English
Date: 2005
Journal or Publication Title: Journal of Telecommunications and Technology
Volume of the journal: 1
Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Date Deposited: 20 Nov 2008 08:22
Last Modified: 20 Feb 2020 13:25
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