Ballas, R. G. ; Greiner, P. F. ; Schlaak, Helmut F. (2005)
Smart piezoelectric bending micro actuator : an integrated inductive non-contact proximity sensor to detect tip deflection.
Mikrosystemtechnik Kongress 2005. Freiburg (10.10.2005-12.10.2005)
Conference or Workshop Item, Bibliographie
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 2005 |
| Creators: | Ballas, R. G. ; Greiner, P. F. ; Schlaak, Helmut F. |
| Type of entry: | Bibliographie |
| Title: | Smart piezoelectric bending micro actuator : an integrated inductive non-contact proximity sensor to detect tip deflection |
| Language: | German |
| Date: | 10 October 2005 |
| Place of Publication: | Berlin |
| Publisher: | VDE-Verlag |
| Event Title: | Mikrosystemtechnik Kongress 2005 |
| Event Location: | Freiburg |
| Event Dates: | 10.10.2005-12.10.2005 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Electromechanical Design (dissolved 18.12.2018) 18 Department of Electrical Engineering and Information Technology > Microtechnology and Electromechanical Systems |
| Date Deposited: | 20 Nov 2008 08:22 |
| Last Modified: | 12 Jan 2024 08:57 |
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