Ruland, Tino ; Stefanov, Yordan ; Rispal, Lorraine ; Schwalke, Udo (2004)
Application of Atomic Force Microscopy in Resist Structure Evaluation.
In: VDI/VDE-Gesellschaft Mess- und Automatisierungstechnik, (1860)
Article, Bibliographie
| Item Type: | Article |
|---|---|
| Erschienen: | 2004 |
| Creators: | Ruland, Tino ; Stefanov, Yordan ; Rispal, Lorraine ; Schwalke, Udo |
| Type of entry: | Bibliographie |
| Title: | Application of Atomic Force Microscopy in Resist Structure Evaluation |
| Language: | English |
| Date: | 15 October 2004 |
| Journal or Publication Title: | VDI/VDE-Gesellschaft Mess- und Automatisierungstechnik |
| Issue Number: | 1860 |
| Additional Information: | International Symposium on Measurement and Quality Control in Production, Erlangen, Deutschland, 12.-15.10.2004 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
| Date Deposited: | 20 Nov 2008 08:20 |
| Last Modified: | 08 May 2024 08:10 |
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