Stefanov, Yordan ; Ruland, Tino ; Schwalke, Udo (2004)
Electrical AFM Measurements for Evaluation of Nitride Erosion in Shallow Trench Isolation Chemical Mechanical Planarization.
In: Proceedings of the MRS Fall Meeting 2004
Article, Bibliographie
| Item Type: | Article |
|---|---|
| Erschienen: | 2004 |
| Creators: | Stefanov, Yordan ; Ruland, Tino ; Schwalke, Udo |
| Type of entry: | Bibliographie |
| Title: | Electrical AFM Measurements for Evaluation of Nitride Erosion in Shallow Trench Isolation Chemical Mechanical Planarization |
| Language: | English |
| Date: | 3 December 2004 |
| Journal or Publication Title: | Proceedings of the MRS Fall Meeting 2004 |
| Additional Information: | Symposium on Scanning Probe and Other Novel Microscopies of Local Phenomena in Nanostructured Materials, Boston, MA, USA, 29.11.-03.12.2004 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
| Date Deposited: | 20 Nov 2008 08:20 |
| Last Modified: | 08 May 2024 09:09 |
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