Stefanov, Yordan ; Komaragiri, Rama Subrahmanyam ; Ruland, Tino ; Schwalke, Udo (2004)
Electrical AFM Measurements for STI CMP Erosion Evaluation.
In: Nanoscale International Conference: Abstracts
Article, Bibliographie
| Item Type: | Article |
|---|---|
| Erschienen: | 2004 |
| Creators: | Stefanov, Yordan ; Komaragiri, Rama Subrahmanyam ; Ruland, Tino ; Schwalke, Udo |
| Type of entry: | Bibliographie |
| Title: | Electrical AFM Measurements for STI CMP Erosion Evaluation |
| Language: | English |
| Date: | 15 October 2004 |
| Journal or Publication Title: | Nanoscale International Conference: Abstracts |
| Additional Information: | Nanoscale International Conference, Grenoble, Frankreich, 13.-15.10.2004 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
| Date Deposited: | 20 Nov 2008 08:20 |
| Last Modified: | 08 May 2024 08:19 |
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