Stefanov, Yordan ; Cilek, F. ; Endres, Ralf ; Schwalke, Udo (2005)
Alternative Optimization Techniques for Shallow Trench Isolation and Replacement Gate Technology CMP.
The 2nd Pacific-Rim International Conference on Planarization CMP and Its Application Technology (PacRim-CMP). Seoul, Korea (17.-19.11.2005)
Conference or Workshop Item, Bibliographie
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 2005 |
| Creators: | Stefanov, Yordan ; Cilek, F. ; Endres, Ralf ; Schwalke, Udo |
| Type of entry: | Bibliographie |
| Title: | Alternative Optimization Techniques for Shallow Trench Isolation and Replacement Gate Technology CMP |
| Language: | English |
| Date: | 11 November 2005 |
| Event Title: | The 2nd Pacific-Rim International Conference on Planarization CMP and Its Application Technology (PacRim-CMP) |
| Event Location: | Seoul, Korea |
| Event Dates: | 17.-19.11.2005 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
| Date Deposited: | 20 Nov 2008 08:19 |
| Last Modified: | 05 Mar 2013 09:02 |
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