| Item Type: |
Article
|
| Erschienen: |
1995 |
| Creators: |
Stobiecki, T. ; Stobiecki, ; Conradi, ; Kraegermann, ; Röll, ; Berg, |
| Type of entry: |
Bibliographie |
| Title: |
RFA as control of the reactive sputtering process on TiN films |
| Language: |
English |
| Date: |
1 January 1995 |
| Journal or Publication Title: |
Fresenius journal of analytical chemistry. 353 (1995), S. 536-540 |
| Divisions: |
16 Department of Mechanical Engineering |
| Date Deposited: |
19 Nov 2008 15:56 |
| Last Modified: |
20 Feb 2020 13:32 |
| PPN: |
|
| Export: |
|
| Suche nach Titel in: |
TUfind oder in Google |
Drucken
Impressum