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Device Level and Nanoscale Electrical Characterization of Crystalline Praseodymium Oxide High-k Gate Dielectric MOSFETs

Stefanov, Yordan ; Komaragiri, Rama Subrahmanyam ; Schwalke, Udo (2004)
Device Level and Nanoscale Electrical Characterization of Crystalline Praseodymium Oxide High-k Gate Dielectric MOSFETs.
In: Proceedings of the SEMATECH International Workshop on Electrical Characterization and Reliability for High-K Devices
Article, Bibliographie

Item Type: Article
Erschienen: 2004
Creators: Stefanov, Yordan ; Komaragiri, Rama Subrahmanyam ; Schwalke, Udo
Type of entry: Bibliographie
Title: Device Level and Nanoscale Electrical Characterization of Crystalline Praseodymium Oxide High-k Gate Dielectric MOSFETs
Language: English
Date: 5 November 2004
Journal or Publication Title: Proceedings of the SEMATECH International Workshop on Electrical Characterization and Reliability for High-K Devices
Additional Information:

SEMATECH International Workshop on Electrical Characterization and Reliability for High-K Devices, Austin, TX, USA, 04.-05.11.2004

Divisions: 18 Department of Electrical Engineering and Information Technology
18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics
Date Deposited: 20 Nov 2008 08:18
Last Modified: 07 May 2024 10:52
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