Klemberg-Sapieha, J. ; Martinu, L. ; Thielemann, C. ; Günther, P. (1995):
Plasma deposition of low stress electret films for electroacoustic and solar cell applications.
In: Journal of vaccum science and technology. 13 (1995), [Article]
| Item Type: | Article |
|---|---|
| Erschienen: | 1995 |
| Creators: | Klemberg-Sapieha, J. ; Martinu, L. ; Thielemann, C. ; Günther, P. |
| Title: | Plasma deposition of low stress electret films for electroacoustic and solar cell applications |
| Language: | English |
| Journal or Publication Title: | Journal of vaccum science and technology. 13 (1995) |
| Divisions: | 18 Department of Electrical Engineering and Information Technology |
| Date Deposited: | 19 Nov 2008 16:28 |
| License: | [undefiniert] |
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