Schwalke, Udo (2001)
Progress in Device Isolation Technology.
In: Microelectronis Reliability, 41 (4)
Article, Bibliographie
| Item Type: | Article |
|---|---|
| Erschienen: | 2001 |
| Creators: | Schwalke, Udo |
| Type of entry: | Bibliographie |
| Title: | Progress in Device Isolation Technology |
| Language: | English |
| Date: | 2001 |
| Journal or Publication Title: | Microelectronis Reliability |
| Volume of the journal: | 41 |
| Issue Number: | 4 |
| URL / URN: | http://dx.doi.org/10.1016/S0026-2714(00)00259-6 |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Semiconductor Technology and Nano-Electronics |
| Date Deposited: | 19 Nov 2008 16:28 |
| Last Modified: | 20 Feb 2020 13:27 |
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