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Nanoparticle emission by electronic sputtering of CaF2 single crystals

Alencar, I. ; Hatori, M. ; Marmitt, G. G. ; Trombini, H. ; Grande, P. L. ; Dias, J. F. ; Papaléo, R. M. ; Mücklich, A. ; Assmann, W. ; Toulemonde, M. ; Trautmann, C. (2021)
Nanoparticle emission by electronic sputtering of CaF2 single crystals.
In: Applied Surface Science, 537
doi: 10.1016/j.apsusc.2020.147821
Article, Bibliographie

Abstract

Material sputtered from CaF2 single crystals by 180 MeV Au ions impinging at different incidence angles were collected on high-purity amorphous C-coated Cu grids and Si(1 0 0) wafer catcher surfaces over a broad angular range. These catcher surfaces were characterized complementary by transmission electron microscopy, atomic force microscopy and medium energy ion scattering, revealing the presence of a distribution of partially buried CaF2 nanoparticles in conjunction to a thin layer of deposited CaF2 material. Particle size distributions do not follow simple power laws and depend on the angles of ion incidence and particle detection. It is shown that the particle ejection is directly related to the jet-like component of sputtering, previously observed in ionic crystals, contributing significantly to the total yield. This contribution enhances as the impinging ions approach grazing incidence. Possible scenarios for the emission of particles are discussed in light of these observations.

Item Type: Article
Erschienen: 2021
Creators: Alencar, I. ; Hatori, M. ; Marmitt, G. G. ; Trombini, H. ; Grande, P. L. ; Dias, J. F. ; Papaléo, R. M. ; Mücklich, A. ; Assmann, W. ; Toulemonde, M. ; Trautmann, C.
Type of entry: Bibliographie
Title: Nanoparticle emission by electronic sputtering of CaF2 single crystals
Language: English
Date: 30 January 2021
Publisher: Elsevier
Journal or Publication Title: Applied Surface Science
Volume of the journal: 537
DOI: 10.1016/j.apsusc.2020.147821
Abstract:

Material sputtered from CaF2 single crystals by 180 MeV Au ions impinging at different incidence angles were collected on high-purity amorphous C-coated Cu grids and Si(1 0 0) wafer catcher surfaces over a broad angular range. These catcher surfaces were characterized complementary by transmission electron microscopy, atomic force microscopy and medium energy ion scattering, revealing the presence of a distribution of partially buried CaF2 nanoparticles in conjunction to a thin layer of deposited CaF2 material. Particle size distributions do not follow simple power laws and depend on the angles of ion incidence and particle detection. It is shown that the particle ejection is directly related to the jet-like component of sputtering, previously observed in ionic crystals, contributing significantly to the total yield. This contribution enhances as the impinging ions approach grazing incidence. Possible scenarios for the emission of particles are discussed in light of these observations.

Uncontrolled Keywords: nanoparticle, swift heavy ions, electronic sputtering, catcher technique, transmission electron microscopy, atomic force microscopy, medium energy ion scattering
Additional Information:

Artikel-ID: 147821

Divisions: 11 Department of Materials and Earth Sciences
11 Department of Materials and Earth Sciences > Material Science
11 Department of Materials and Earth Sciences > Material Science > Ion-Beam-Modified Materials
Date Deposited: 29 Feb 2024 08:00
Last Modified: 29 Feb 2024 08:00
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