Alencar, I. ; Hatori, M. ; Marmitt, G. G. ; Trombini, H. ; Grande, P. L. ; Dias, J. F. ; Papaléo, R. M. ; Mücklich, A. ; Assmann, W. ; Toulemonde, M. ; Trautmann, C. (2021)
Nanoparticle emission by electronic sputtering of CaF2 single crystals.
In: Applied Surface Science, 537
doi: 10.1016/j.apsusc.2020.147821
Article, Bibliographie
Abstract
Material sputtered from CaF2 single crystals by 180 MeV Au ions impinging at different incidence angles were collected on high-purity amorphous C-coated Cu grids and Si(1 0 0) wafer catcher surfaces over a broad angular range. These catcher surfaces were characterized complementary by transmission electron microscopy, atomic force microscopy and medium energy ion scattering, revealing the presence of a distribution of partially buried CaF2 nanoparticles in conjunction to a thin layer of deposited CaF2 material. Particle size distributions do not follow simple power laws and depend on the angles of ion incidence and particle detection. It is shown that the particle ejection is directly related to the jet-like component of sputtering, previously observed in ionic crystals, contributing significantly to the total yield. This contribution enhances as the impinging ions approach grazing incidence. Possible scenarios for the emission of particles are discussed in light of these observations.
Item Type: | Article |
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Erschienen: | 2021 |
Creators: | Alencar, I. ; Hatori, M. ; Marmitt, G. G. ; Trombini, H. ; Grande, P. L. ; Dias, J. F. ; Papaléo, R. M. ; Mücklich, A. ; Assmann, W. ; Toulemonde, M. ; Trautmann, C. |
Type of entry: | Bibliographie |
Title: | Nanoparticle emission by electronic sputtering of CaF2 single crystals |
Language: | English |
Date: | 30 January 2021 |
Publisher: | Elsevier |
Journal or Publication Title: | Applied Surface Science |
Volume of the journal: | 537 |
DOI: | 10.1016/j.apsusc.2020.147821 |
Abstract: | Material sputtered from CaF2 single crystals by 180 MeV Au ions impinging at different incidence angles were collected on high-purity amorphous C-coated Cu grids and Si(1 0 0) wafer catcher surfaces over a broad angular range. These catcher surfaces were characterized complementary by transmission electron microscopy, atomic force microscopy and medium energy ion scattering, revealing the presence of a distribution of partially buried CaF2 nanoparticles in conjunction to a thin layer of deposited CaF2 material. Particle size distributions do not follow simple power laws and depend on the angles of ion incidence and particle detection. It is shown that the particle ejection is directly related to the jet-like component of sputtering, previously observed in ionic crystals, contributing significantly to the total yield. This contribution enhances as the impinging ions approach grazing incidence. Possible scenarios for the emission of particles are discussed in light of these observations. |
Uncontrolled Keywords: | nanoparticle, swift heavy ions, electronic sputtering, catcher technique, transmission electron microscopy, atomic force microscopy, medium energy ion scattering |
Additional Information: | Artikel-ID: 147821 |
Divisions: | 11 Department of Materials and Earth Sciences 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences > Material Science > Ion-Beam-Modified Materials |
Date Deposited: | 29 Feb 2024 08:00 |
Last Modified: | 29 Feb 2024 08:00 |
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