Berberich, Stephan ; Godignon, P. ; Morvan, E. ; Fonseca, L. ; Millan, J. ; Hartnagel, H. L. (1999)
Electrical characterisation of Si3N4/SiO2 double layers on p-type 6H-SiC.
Conference or Workshop Item
| Item Type: | Conference or Workshop Item |
|---|---|
| Erschienen: | 1999 |
| Creators: | Berberich, Stephan ; Godignon, P. ; Morvan, E. ; Fonseca, L. ; Millan, J. ; Hartnagel, H. L. |
| Type of entry: | Bibliographie |
| Title: | Electrical characterisation of Si3N4/SiO2 double layers on p-type 6H-SiC |
| Language: | English |
| Date: | 1 January 1999 |
| Series: | Workshop on Dielectrics <10, 1999, Barcelona>: Proceedings |
| Additional Information: | Zeichendarst. im Sachtitel teilw. nicht vorlagegemäß wiedergegeben |
| Divisions: | 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Microwave Electronics |
| Date Deposited: | 19 Nov 2008 16:22 |
| Last Modified: | 14 Feb 2019 10:47 |
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