Giere, A. ; Schafranek, Robert ; Zheng, Yuliang ; Maune, Holger ; Sazegar, Mohsen ; Jakoby, Rolf ; Klein, Anja (2008):
Characterization of Acoustic Effects in Ferroelectric Thin-Films for Microwave Components. (Publisher's Version)
In: Frequenz, 62 (3-4), pp. 52-56. De Gruyter, ISSN 0016-1136,
DOI: 10.25534/tuprints-00013399,
[Article]
Abstract
In this paper we present the impact of acoustic resonances excited by electrostriction in BST thin-films on the Q-factor of a varactor in the GHz range. By changing the process-parameter substrate to target distance while sputtering the thin-films, we observe a change in the acoustic resonance frequencies. To characterize the material properties which determine the acoustic resonance frequencies a model based on a 1D acoustic transmission line is used. The extracted material properties results in a proportional dependency to the changed process parameter. For verification of the acoustic transmission line model 3D simulations have been performed which show good agreement to the line model for lower resonance frequencies, where the difference at higher frequencies becomes significant due to additional higher order modes.
| Item Type: | Article |
|---|---|
| Erschienen: | 2008 |
| Creators: | Giere, A. ; Schafranek, Robert ; Zheng, Yuliang ; Maune, Holger ; Sazegar, Mohsen ; Jakoby, Rolf ; Klein, Anja |
| Origin: | Secondary publication service |
| Status: | Publisher's Version |
| Title: | Characterization of Acoustic Effects in Ferroelectric Thin-Films for Microwave Components |
| Language: | English |
| Abstract: | In this paper we present the impact of acoustic resonances excited by electrostriction in BST thin-films on the Q-factor of a varactor in the GHz range. By changing the process-parameter substrate to target distance while sputtering the thin-films, we observe a change in the acoustic resonance frequencies. To characterize the material properties which determine the acoustic resonance frequencies a model based on a 1D acoustic transmission line is used. The extracted material properties results in a proportional dependency to the changed process parameter. For verification of the acoustic transmission line model 3D simulations have been performed which show good agreement to the line model for lower resonance frequencies, where the difference at higher frequencies becomes significant due to additional higher order modes. |
| Journal or Publication Title: | Frequenz |
| Volume of the journal: | 62 |
| Issue Number: | 3-4 |
| Publisher: | De Gruyter |
| Divisions: | 11 Department of Materials and Earth Sciences 11 Department of Materials and Earth Sciences > Material Science 11 Department of Materials and Earth Sciences > Material Science > Surface Science 18 Department of Electrical Engineering and Information Technology 18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics (IMP) > Microwave Engineering 18 Department of Electrical Engineering and Information Technology > Institute for Microwave Engineering and Photonics (IMP) |
| Date Deposited: | 30 Nov 2020 13:55 |
| DOI: | 10.25534/tuprints-00013399 |
| URL / URN: | https://tuprints.ulb.tu-darmstadt.de/13399 |
| URN: | urn:nbn:de:tuda-tuprints-133993 |
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| Corresponding Links: | |
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